Thin dielectrics for VLSI applications

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Grant Data
Project Title
Thin dielectrics for VLSI applications
Principal Investigator
Professor Lai, Pui To   (Principal Investigator (PI))
Co-Investigator(s)
Professor Cheng Yiu Chung   (Co-Investigator)
Duration
36
Start Date
1996-01-01
Amount
651000
Conference Title
Thin dielectrics for VLSI applications
Presentation Title
Keywords
null
Discipline
N/A
HKU Project Code
HKU 298/95E
Grant Type
General Research Fund (GRF)
Funding Year
1995
Status
Completed