Development of Novel Resist Materials and Fabrication Methods for Sub-10 nm Nanoimprint Templates Made by Helium Ion Beam Lithography


Grant Data
Project Title
Development of Novel Resist Materials and Fabrication Methods for Sub-10 nm Nanoimprint Templates Made by Helium Ion Beam Lithography
Principal Investigator
Dr Li, Wendi   (Principal investigator)
Co-Investigator(s)
Dr Drift Emile van der   (Co-Investigator)
Dr Alkemade Paul F.A.   (Co-principal investigator)
Duration
24
Start Date
2012-07-01
Completion Date
2014-06-30
Amount
55800
Conference Title
Presentation Title
Keywords
Development of, Novel Resist Materials, Fabrication Methods, Sub-10nm Nanoimprint Templates, Helium Ion Beam Lithography
Discipline
Materials Sciences,Others - Physical Sciences
Panel
Engineering
Sponsor
NWO / RGC Joint Research Scheme
HKU Project Code
D-HK005/12T
Grant Type
NWO / RGC Joint Research Scheme - Travel Grants
Funding Year
2012/2013
Status
Completed