Development of Novel Resist Materials and Fabrication Methods for Sub-10 nm Nanoimprint Templates Made by Helium Ion Beam Lithography
Grant Data
Project Title
Development of Novel Resist Materials and Fabrication Methods for Sub-10 nm Nanoimprint Templates Made by Helium Ion Beam Lithography
Principal Investigator
Dr Li, Wendi
(Principal Investigator (PI))
Co-Investigator(s)
Dr Alkemade Paul F.A.
(Co-principal investigator)
Dr Drift Emile van der
(Co-Investigator)
Duration
24
Start Date
2012-07-01
Amount
55800
Conference Title
Development of Novel Resist Materials and Fabrication Methods for Sub-10 nm Nanoimprint Templates Made by Helium Ion Beam Lithography
Presentation Title
Keywords
Development of, Fabrication Methods, Helium Ion Beam Lithography, Novel Resist Materials, Sub-10nm Nanoimprint Templates
Discipline
Materials Sciences,Others - Physical Sciences
Panel
Engineering (E)
HKU Project Code
D-HK005/12T
Grant Type
NWO / RGC Joint Research Scheme - Travel Grants
Funding Year
2012
Status
Completed