Browsing by Author Srituravanich, W.

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Showing results 1 to 4 of 4
TitleAuthor(s)Issue Date
 
Deep subwavelength nanolithography using localized surface plasmon modes on planar silver mask
Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
2005
Plasmonic lithography
Proceeding/Conference:Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications
2004
 
Sub-100 nm lithography using ultrashort wavelength of surface plasmons
Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
2004
Subwavelength nanolithography using surface plasmons
Proceeding/Conference:Proceedings of the IEEE Conference on Nanotechnology
2003