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Title | Author(s) | Issue Date | |
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A Coupled Electromagnetic and Thermal Model for Picosecond and Nanometer Scale Plasmonic Lithography Process Journal:Journal of Micro and Nano-Manufacturing | 2014 |
Title | Author(s) | Issue Date | |
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A Coupled Electromagnetic and Thermal Model for Picosecond and Nanometer Scale Plasmonic Lithography Process Journal:Journal of Micro and Nano-Manufacturing | 2014 |