Showing results 4 to 5 of 5
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| Title | Author(s) | Issue Date | |
|---|---|---|---|
Effects of annealing gas species on the electrical properties and reliability of Ge MOS capacitors with high-k Y 2O 3 gate dielectric Proceeding/Conference:2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009 | 2009 | ||
Optimization of N content for higk-k LaTiON gate dielectric of Ge MOS capacitor Proceeding/Conference:2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009 | 2009 |