Showing results 2 to 3 of 3
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Title | Author(s) | Issue Date | |
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Tunable solenoid microinductors utilizing permalloy electro-thermal vibromotors Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 | ||
A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 |