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Collection's Items (Sorted by Submit Date in Descending order): 801 to 820 of 854
TitleAuthor(s)Issue Date
 
2006
 
2001
 
2004
 
2004
 
A low-voltage lateral MEMS switch with high RF performance
Journal:Journal of Microelectromechanical Systems
2004
 
2002
 
2004
 
2002
 
2000
 
On-chip spiral inductors suspended over deep copper-lined cavities
Journal:IEEE Transactions on Microwave Theory and Techniques
2000
 
Electrostatic model for an asymmetric combdrive
Journal:Journal of Microelectromechanical Systems
2000
 
Copper-encapsulated silicon micromachined structures
Journal:Journal of Microelectromechanical Systems
2000
 
2000
 
2000
 
1996
 
1999
 
Electrothermally actuated bi-directional linear vibromotor
Journal:Microscale Thermophysical Engineering
1999
 
Silicon micromachined thermal sensors and actuators
Journal:Microscale Thermophysical Engineering
1997
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
 
Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion
Journal:International Journal of Heat and Mass Transfer
1996
Collection's Items (Sorted by Submit Date in Descending order): 801 to 820 of 854