Showing results 6 to 7 of 7
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Title | Author(s) | Issue Date | Views | |
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Kinetics of thermal oxidation of 6H silicon carbide in oxygen plus trichloroethylene Journal:Journal of the Electrochemical Society | 2005 | 198 | ||
Ultra-shallow n +p junction formed by PH 3 and AsH 3 plasma immersion ion implantation Journal:Microelectronics Reliability | 2002 | 195 |