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Title | Author(s) | Issue Date | Views | |
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A study on fluorine incorporation in Ge p-MOS capacitors with HfTiON dielectric Journal:Microelectronic Engineering | 2009 | 268 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
A study on fluorine incorporation in Ge p-MOS capacitors with HfTiON dielectric Journal:Microelectronic Engineering | 2009 | 268 |