Showing results 1 to 2 of 2
Title | Author(s) | Issue Date | Views | |
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1998 | 139 | |||
Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics Proceeding/Conference:Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 | 2005 | 120 |