Grant: Imaging limits in optical projection lithography

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Project Title
Imaging limits in optical projection lithography
 
Principal Investigator Lam, Edmund Yin Mun (Principal investigator)
Co-Investigator(s) Dr Wong Alfred Kwok Kit (Co-Investigator)
Project Code
HKU 713408E
 
Funding Year
2008/2009
 
Amount
491906
 
Panel Engineering (E)
Start Date
01-01-2009
 
Expected Completion
30-06-2012
 
Status
On-going
 
Keywords optical projection, lithography, Imaging
Discipline Electronics, Signal and Image Processing
Sponsor RGC General Research Fund (GRF)
Grant Type/Funding Scheme General Research Fund (GRF)
Duration
42
 
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