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Results 1-25 of 98 (Search time: 0.109 seconds).

TitleAuthor(s)Issue DateViews
 
Selective chemical etching of InP over InAlAs
Journal:Journal of the Electrochemical Society
1992
128
 
1992
50
 
1995
67
 
Surface-micromachined mirrors for laser-beam positioning
Journal:Sensors and Actuators, A: Physical
1996
70
 
1996
82
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
56
 
Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion
Journal:International Journal of Heat and Mass Transfer
1996
77
 
1996
69
 
2000
52
Linear microvibromotor for positioning optical components
Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems
1995
54
Surface-micromachined mirrors for laser-beam positioning
Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
1995
61
Actuation of polysilicon surface-micromachined mirrors
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
1996
69
 
On-chip spiral inductors suspended over deep copper-lined cavities
Journal:IEEE Transactions on Microwave Theory and Techniques
2000
61
 
2002
73
 
2002
59
 
2004
72
 
2004
95
 
2004
88
 
2001
97
 
2005
79
Multiplexed label-free biosensor chip based on nanoscale electrical double layer capacitance sensing
Proceeding/Conference:Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications
2004
74
2004
135
Wavelength routing with MEMS switch and a single AWG
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
2005
57
Electrical breakdown across micron scale gaps in MEMS structures
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
2006
70
3-D MEMS based real-time minimally invasive endoscopic optical coherence tomography
Proceeding/Conference:IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
2005
92