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Results 1-25 of 98 (Search time: 0.036 seconds).

TitleAuthor(s)Issue DateViews
 
Surface-micromachined mirrors for laser-beam positioning
Journal:Sensors and Actuators, A: Physical
1996
120
A three dimensional real-time MEMS based optical biopsy system for in-vivo clinical imaging
Proceeding/Conference:TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007
130
Nanoscale Al-Al and Cu-Cu contacts
Proceeding/Conference:TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
2007
105
2010
110
A process research for integrated RF tunable filter
Proceeding/Conference:Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
2006
102
 
Linear microvibromotor for positioning optical components
Journal:Journal of Microelectromechanical Systems
1996
148
Linear microvibromotor for positioning optical components
Proceeding/Conference:Proceedings of the IEEE Micro Electro Mechanical Systems
1995
104
 
1996
Optimized and microfabricated ionic wind pump array as a next generation solution for electronics cooling systems
Proceeding/Conference:InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITHERM
2012
53
 
1995
201
 
2002
123
The future of MEMS in energy technologies
Proceeding/Conference:International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT
2008
129
 
1992
104
 
2004
2014
 
2004
 
2001
97
Electromagnetically shielded high-Q CMOS-compatible copper inductors
Proceeding/Conference:Digest of Technical Papers - IEEE International Solid-State Circuits Conference
2000
75
Surface-micromachined mirrors for laser-beam positioning
Proceeding/Conference:International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
1995
112
2004
176
Modeling and measurement of microfabricated corona discharge structures
Proceeding/Conference:3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
2008
113
 
2002
 
2007
Micro-optical inertial sensors using silicon MEMS
Proceeding/Conference:IEEE Aerospace Applications Conference Proceedings
1998
101
 
1999
173