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Article: AFM Tip Position Control in situ for Effective Nano-Manipulation

TitleAFM Tip Position Control in situ for Effective Nano-Manipulation
Authors
Issue Date2018
PublisherIEEE. The Journal's web site is located at https://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=3516
Citation
IEEE/ASME Transactions on Mechatronics, 2018, v. 23 n. 6, p. 2825-2836 How to Cite?
AbstractThe spatial uncertainties of atomic force microscope (AFM) tip position hinder the development of the AFM based nano-manipulation. These uncertainties cannot be corrected at nanoscale using the traditional position sensor, which is used in the macro robot localization. As for that problem, we propose that the AFM tip is used as the sensor to detect the landmark in the sample surface via a local-scan based motion. The landmark positions are used to estimate the tip position in the task frame. The local-scan based observation model is built on the foundation of the tip motion model. These model parameters are calibrated using statistical experiments. Simulation and experimental results show that the proposed method can improve the accuracy of the tip position. Then the influence of the tip position accuracy is analyzed by using nano-manipulation results of the experiments. Furtherly, three important factors in AFM tip based nano-manipulation are discussed. The landmark domain as the first factor is analyzed for assurance of the tip accuracy before nano-manipulation. The second one is studying the contact characteristics between the nanoparticle and the substrate by detecting nano-manipulation force. The last one is taking the tip shape into account for effective manipulation through fine tuning the tip offset. Finally, the experimental results illustrate the effectiveness of the proposed method for fabricating the nano-structures and devices.
Persistent Identifierhttp://hdl.handle.net/10722/262330
ISSN
2017 Impact Factor: 3.936
2015 SCImago Journal Rankings: 2.305
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorYuan, S-
dc.contributor.authorWang, Z-
dc.contributor.authorXi, N-
dc.contributor.authorWang, Y-
dc.contributor.authorLiu, L-
dc.date.accessioned2018-09-28T04:57:28Z-
dc.date.available2018-09-28T04:57:28Z-
dc.date.issued2018-
dc.identifier.citationIEEE/ASME Transactions on Mechatronics, 2018, v. 23 n. 6, p. 2825-2836-
dc.identifier.issn1083-4435-
dc.identifier.urihttp://hdl.handle.net/10722/262330-
dc.description.abstractThe spatial uncertainties of atomic force microscope (AFM) tip position hinder the development of the AFM based nano-manipulation. These uncertainties cannot be corrected at nanoscale using the traditional position sensor, which is used in the macro robot localization. As for that problem, we propose that the AFM tip is used as the sensor to detect the landmark in the sample surface via a local-scan based motion. The landmark positions are used to estimate the tip position in the task frame. The local-scan based observation model is built on the foundation of the tip motion model. These model parameters are calibrated using statistical experiments. Simulation and experimental results show that the proposed method can improve the accuracy of the tip position. Then the influence of the tip position accuracy is analyzed by using nano-manipulation results of the experiments. Furtherly, three important factors in AFM tip based nano-manipulation are discussed. The landmark domain as the first factor is analyzed for assurance of the tip accuracy before nano-manipulation. The second one is studying the contact characteristics between the nanoparticle and the substrate by detecting nano-manipulation force. The last one is taking the tip shape into account for effective manipulation through fine tuning the tip offset. Finally, the experimental results illustrate the effectiveness of the proposed method for fabricating the nano-structures and devices.-
dc.languageeng-
dc.publisherIEEE. The Journal's web site is located at https://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=3516-
dc.relation.ispartofIEEE/ASME Transactions on Mechatronics-
dc.rights©2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.-
dc.titleAFM Tip Position Control in situ for Effective Nano-Manipulation-
dc.typeArticle-
dc.identifier.emailXi, N: xining@hku.hk-
dc.identifier.authorityXi, N=rp02044-
dc.description.naturepostprint-
dc.identifier.doi10.1109/TMECH.2018.2868983-
dc.identifier.hkuros292450-
dc.identifier.volume23-
dc.identifier.issue6-
dc.identifier.spage2825-
dc.identifier.epage2836-
dc.identifier.isiWOS:000453560200029-
dc.publisher.placeUnited States-

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