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Conference Paper: Stiction Problems in Releasing of 3D Microstructures and Its Solution

TitleStiction Problems in Releasing of 3D Microstructures and Its Solution
Authors
KeywordsPhoto polymerization
Surface tension
Micro stereolithography
MEMS
Polymer
Issue Date2003
Citation
Proceedings of SPIE - The International Society for Optical Engineering, 2003, v. 5225, p. 40-48 How to Cite?
AbstractMicro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion.
Persistent Identifierhttp://hdl.handle.net/10722/256889
ISSN

 

DC FieldValueLanguage
dc.contributor.authorWu, Dongmin-
dc.contributor.authorFang, Nicholas-
dc.contributor.authorSun, Cheng-
dc.contributor.authorZhang, Xiang-
dc.date.accessioned2018-07-24T08:58:15Z-
dc.date.available2018-07-24T08:58:15Z-
dc.date.issued2003-
dc.identifier.citationProceedings of SPIE - The International Society for Optical Engineering, 2003, v. 5225, p. 40-48-
dc.identifier.issn0277-786X-
dc.identifier.urihttp://hdl.handle.net/10722/256889-
dc.description.abstractMicro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion.-
dc.languageeng-
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineering-
dc.subjectPhoto polymerization-
dc.subjectSurface tension-
dc.subjectMicro stereolithography-
dc.subjectMEMS-
dc.subjectPolymer-
dc.titleStiction Problems in Releasing of 3D Microstructures and Its Solution-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-1242263782-
dc.identifier.volume5225-
dc.identifier.spage40-
dc.identifier.epage48-

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