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Conference Paper: Nanolithography with a NSOM tip - Part II: Experiments

TitleNanolithography with a NSOM tip - Part II: Experiments
Authors
Issue Date2001
Citation
American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD, 2001, v. 369, n. 6, p. 209-214 How to Cite?
AbstractWe present in this paper a nanolithographic method by introducing a local photo-polymerization in the proximity of tapered optical fiber tip immersed in photocurable resin. The metallic apertured tip, when approached to a solid substrate at a few nanometers distance, delivers UV light to the vicinity of the tip apex and forms a subwavelength light source. The confined light source permits the polymerization to occur locally at the tip extremity, thus allowing generation of micronic/nanometric polymer features. The nanometric positioning control, realized by a commercial AFM operating in tapping mode, ensures the automation of nanolithographic process. The preliminary results presented here validate the concept of near field scanning optical lithography.
Persistent Identifierhttp://hdl.handle.net/10722/256884
ISSN

 

DC FieldValueLanguage
dc.contributor.authorFang, Nicholas-
dc.contributor.authorSun, Cheng-
dc.contributor.authorWan, Zhiliang-
dc.contributor.authorZhang, Xiang-
dc.date.accessioned2018-07-24T08:58:13Z-
dc.date.available2018-07-24T08:58:13Z-
dc.date.issued2001-
dc.identifier.citationAmerican Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD, 2001, v. 369, n. 6, p. 209-214-
dc.identifier.issn0272-5673-
dc.identifier.urihttp://hdl.handle.net/10722/256884-
dc.description.abstractWe present in this paper a nanolithographic method by introducing a local photo-polymerization in the proximity of tapered optical fiber tip immersed in photocurable resin. The metallic apertured tip, when approached to a solid substrate at a few nanometers distance, delivers UV light to the vicinity of the tip apex and forms a subwavelength light source. The confined light source permits the polymerization to occur locally at the tip extremity, thus allowing generation of micronic/nanometric polymer features. The nanometric positioning control, realized by a commercial AFM operating in tapping mode, ensures the automation of nanolithographic process. The preliminary results presented here validate the concept of near field scanning optical lithography.-
dc.languageeng-
dc.relation.ispartofAmerican Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD-
dc.titleNanolithography with a NSOM tip - Part II: Experiments-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-0346884324-
dc.identifier.volume369-
dc.identifier.issue6-
dc.identifier.spage209-
dc.identifier.epage214-

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