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Article: Interfacial and electrical properties of InGaAs metal-oxide-semiconductor capacitor with TiON/TaON multilayer composite gate dielectric

TitleInterfacial and electrical properties of InGaAs metal-oxide-semiconductor capacitor with TiON/TaON multilayer composite gate dielectric
Authors
Issue Date2015
PublisherAmerican Institute of Physics. The Journal's web site is located at http://apl.aip.org/
Citation
Applied Physics Letters, 2015, v. 106 n. 12, article no. 123504 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/247435
ISSN
2017 Impact Factor: 3.495
2015 SCImago Journal Rankings: 1.105
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorWang, LS-
dc.contributor.authorXu, JP-
dc.contributor.authorLiu, L-
dc.contributor.authorLu, HH-
dc.contributor.authorLai, PT-
dc.contributor.authorTang, WM-
dc.date.accessioned2017-10-18T08:27:12Z-
dc.date.available2017-10-18T08:27:12Z-
dc.date.issued2015-
dc.identifier.citationApplied Physics Letters, 2015, v. 106 n. 12, article no. 123504-
dc.identifier.issn0003-6951-
dc.identifier.urihttp://hdl.handle.net/10722/247435-
dc.languageeng-
dc.publisherAmerican Institute of Physics. The Journal's web site is located at http://apl.aip.org/-
dc.relation.ispartofApplied Physics Letters-
dc.rightsCopyright 2015 AIP Publishing LLC. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Applied Physics Letters, 2015, v. 106 n. 12, article no. 123504 and may be found at https://doi.org/10.1063/1.4916539-
dc.titleInterfacial and electrical properties of InGaAs metal-oxide-semiconductor capacitor with TiON/TaON multilayer composite gate dielectric-
dc.typeArticle-
dc.identifier.emailLai, PT: laip@eee.hku.hk-
dc.identifier.authorityLai, PT=rp00130-
dc.description.naturepublished_or_final_version-
dc.identifier.doi10.1063/1.4916539-
dc.identifier.hkuros280869-
dc.identifier.volume106-
dc.identifier.issue12-
dc.identifier.spagearticle no. 123504-
dc.identifier.epagearticle no. 123504-
dc.identifier.isiWOS:000351876700050-
dc.publisher.placeUnited States-

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