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Book Chapter: Packaging Processes for Carbon Nanotube-Based Devices

TitlePackaging Processes for Carbon Nanotube-Based Devices
Authors
KeywordsMWCNT
Carbon nanotubes
Dielectrophoretic manipulation
Microelectrodes
Photoresponse
Schottky barriers
SWCNT
Issue Date2012
Citation
Nano Optoelectronic Sensors and Devices, 2012, p. 93-105 How to Cite?
AbstractA systemic approach to maintain, control, and prevent the oxygen doping of CNT-based IR detectors is presented in this chapter. It includes two different processes-oxygen removal by the vacuum thermal annealing and oxygen prevention by parylene C packaging. The photonic behavior of the oxygen-doped and the de-doped CNT-based IR detector are studied. The oxygen molecules removal by thermal annealing process provides significant improvement in the performance of the CNT-based devices and the contact resistances at the CNT-metal interfaces. The fabrication, thermal annealing process, and packaging process of CNT-based IR detectors are also presented. Furthermore, the CNT-based IR detectors, successfully fabricated and their IR responses and I-V characteristics are investigated. Experimental results indicated that the IR sensing ability of the packaged device. Moreover, the packaged CNT-based device was able to sustain and exhibit repeatable photoresponses for a long period of time, which could not be observed from the results of CNT-based devices without parylene C coating. It indicated that parylene C acted as an excellent packaging material, which not only protected CNT-based devices from oxygen contamination, but also improved the stability of the CNT device. Based on the current results, the thermal annealing process and packaging process may potentially become efficient methods to fabricate a CNT-based IR detector array with reliable performance. © 2012 Elsevier Inc. All rights reserved.
Persistent Identifierhttp://hdl.handle.net/10722/213336

 

DC FieldValueLanguage
dc.contributor.authorLai, King Wai Chiu-
dc.contributor.authorXi, Ning-
dc.contributor.authorFung, Carmen Kar Man-
dc.contributor.authorChen, Hongzhi-
dc.date.accessioned2015-07-28T04:06:56Z-
dc.date.available2015-07-28T04:06:56Z-
dc.date.issued2012-
dc.identifier.citationNano Optoelectronic Sensors and Devices, 2012, p. 93-105-
dc.identifier.urihttp://hdl.handle.net/10722/213336-
dc.description.abstractA systemic approach to maintain, control, and prevent the oxygen doping of CNT-based IR detectors is presented in this chapter. It includes two different processes-oxygen removal by the vacuum thermal annealing and oxygen prevention by parylene C packaging. The photonic behavior of the oxygen-doped and the de-doped CNT-based IR detector are studied. The oxygen molecules removal by thermal annealing process provides significant improvement in the performance of the CNT-based devices and the contact resistances at the CNT-metal interfaces. The fabrication, thermal annealing process, and packaging process of CNT-based IR detectors are also presented. Furthermore, the CNT-based IR detectors, successfully fabricated and their IR responses and I-V characteristics are investigated. Experimental results indicated that the IR sensing ability of the packaged device. Moreover, the packaged CNT-based device was able to sustain and exhibit repeatable photoresponses for a long period of time, which could not be observed from the results of CNT-based devices without parylene C coating. It indicated that parylene C acted as an excellent packaging material, which not only protected CNT-based devices from oxygen contamination, but also improved the stability of the CNT device. Based on the current results, the thermal annealing process and packaging process may potentially become efficient methods to fabricate a CNT-based IR detector array with reliable performance. © 2012 Elsevier Inc. All rights reserved.-
dc.languageeng-
dc.relation.ispartofNano Optoelectronic Sensors and Devices-
dc.subjectMWCNT-
dc.subjectCarbon nanotubes-
dc.subjectDielectrophoretic manipulation-
dc.subjectMicroelectrodes-
dc.subjectPhotoresponse-
dc.subjectSchottky barriers-
dc.subjectSWCNT-
dc.titlePackaging Processes for Carbon Nanotube-Based Devices-
dc.typeBook_Chapter-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1016/B978-1-4377-3471-3.00006-X-
dc.identifier.scopuseid_2-s2.0-84882471575-
dc.identifier.spage93-
dc.identifier.epage105-

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