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Conference Paper: Motion controller for the atomic force microscopy based nanomanipulation system

TitleMotion controller for the atomic force microscopy based nanomanipulation system
Authors
Issue Date2009
Citation
2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009, 2009, p. 1339-1344 How to Cite?
AbstractNanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this Multiple Input Single Output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device. © 2009 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/213092

 

DC FieldValueLanguage
dc.contributor.authorYang, Ruiguo-
dc.contributor.authorXi, Ning-
dc.contributor.authorLai, King Wai Chiu-
dc.contributor.authorGao, Bingtuan-
dc.contributor.authorChen, Hongzhi-
dc.contributor.authorSu, Chanmin-
dc.contributor.authorShi, Jian-
dc.date.accessioned2015-07-28T04:06:06Z-
dc.date.available2015-07-28T04:06:06Z-
dc.date.issued2009-
dc.identifier.citation2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009, 2009, p. 1339-1344-
dc.identifier.urihttp://hdl.handle.net/10722/213092-
dc.description.abstractNanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this Multiple Input Single Output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device. © 2009 IEEE.-
dc.languageeng-
dc.relation.ispartof2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009-
dc.titleMotion controller for the atomic force microscopy based nanomanipulation system-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/IROS.2009.5353921-
dc.identifier.scopuseid_2-s2.0-76249101341-
dc.identifier.spage1339-
dc.identifier.epage1344-

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