File Download

There are no files associated with this item.

  Links for fulltext
     (May Require Subscription)
Supplementary

Article: Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation

TitleDesign, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation
Authors
KeywordsVisual servoing
Piezoelectric actuation
Parallel mechanism
Motion control
Micromanipulation
Flexure mechanism
Issue Date2009
Citation
IEEE Transactions on Automation Science and Engineering, 2009, v. 6, n. 4, p. 710-719 How to Cite?
AbstractThis paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 μm × 260 μm with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 μm respectively, can be achieved by the micromanipulator. © 2006 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/213067
ISSN
2015 Impact Factor: 2.696
2015 SCImago Journal Rankings: 1.832

 

DC FieldValueLanguage
dc.contributor.authorXu, Qingsong-
dc.contributor.authorLi, Yangmin-
dc.contributor.authorXi, Ning-
dc.date.accessioned2015-07-28T04:06:02Z-
dc.date.available2015-07-28T04:06:02Z-
dc.date.issued2009-
dc.identifier.citationIEEE Transactions on Automation Science and Engineering, 2009, v. 6, n. 4, p. 710-719-
dc.identifier.issn1545-5955-
dc.identifier.urihttp://hdl.handle.net/10722/213067-
dc.description.abstractThis paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 μm × 260 μm with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 μm respectively, can be achieved by the micromanipulator. © 2006 IEEE.-
dc.languageeng-
dc.relation.ispartofIEEE Transactions on Automation Science and Engineering-
dc.subjectVisual servoing-
dc.subjectPiezoelectric actuation-
dc.subjectParallel mechanism-
dc.subjectMotion control-
dc.subjectMicromanipulation-
dc.subjectFlexure mechanism-
dc.titleDesign, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation-
dc.typeArticle-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/TASE.2009.2021980-
dc.identifier.scopuseid_2-s2.0-70350017971-
dc.identifier.volume6-
dc.identifier.issue4-
dc.identifier.spage710-
dc.identifier.epage719-

Export via OAI-PMH Interface in XML Formats


OR


Export to Other Non-XML Formats