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Conference Paper: The modeling and experiments of a PVDF mirco-force sensor

TitleThe modeling and experiments of a PVDF mirco-force sensor
Authors
KeywordsMicro-force
Sensor
PVDF
Microassembly
Issue Date2008
Citation
3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, 2008, p. 60-64 How to Cite?
AbstractThis paper aims at designing a kind of advanced micro-force sensor that can measure force in the range of submicro-Newton (μN). To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micromanipulation, the polyvinylidene fluoride (PVDF) is fabricated highly sensitive force sensors. This paper illustrates the modeling method of a PVDF sensor. The transformation between the micro interactive force and the output of the sensor is described. To calibrate the transformation, the model of the PVDF cantilever beam that shows the relationship between the interactive force and the deflection of the sensor probe tip is built first. Then, by given deflection, the interactive force can be calculated with the model. Finally, the transformation can be calibrated. Experiment results verify the effectiveness and accuracy of the transformation model, and the sub-μN sensitivity of the sensor. This micro force sensing technology will solve an important problem that restricts the development of micromanipulation and batch assembly of micro devices. © 2008 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/212999

 

DC FieldValueLanguage
dc.contributor.authorLiu, Yiyang-
dc.contributor.authorYu, Peng-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorDong, Zaili-
dc.contributor.authorXi, Ning-
dc.date.accessioned2015-07-28T04:05:43Z-
dc.date.available2015-07-28T04:05:43Z-
dc.date.issued2008-
dc.identifier.citation3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, 2008, p. 60-64-
dc.identifier.urihttp://hdl.handle.net/10722/212999-
dc.description.abstractThis paper aims at designing a kind of advanced micro-force sensor that can measure force in the range of submicro-Newton (μN). To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micromanipulation, the polyvinylidene fluoride (PVDF) is fabricated highly sensitive force sensors. This paper illustrates the modeling method of a PVDF sensor. The transformation between the micro interactive force and the output of the sensor is described. To calibrate the transformation, the model of the PVDF cantilever beam that shows the relationship between the interactive force and the deflection of the sensor probe tip is built first. Then, by given deflection, the interactive force can be calculated with the model. Finally, the transformation can be calibrated. Experiment results verify the effectiveness and accuracy of the transformation model, and the sub-μN sensitivity of the sensor. This micro force sensing technology will solve an important problem that restricts the development of micromanipulation and batch assembly of micro devices. © 2008 IEEE.-
dc.languageeng-
dc.relation.ispartof3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS-
dc.subjectMicro-force-
dc.subjectSensor-
dc.subjectPVDF-
dc.subjectMicroassembly-
dc.titleThe modeling and experiments of a PVDF mirco-force sensor-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/NEMS.2008.4484286-
dc.identifier.scopuseid_2-s2.0-50249183031-
dc.identifier.spage60-
dc.identifier.epage64-

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