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Conference Paper: Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies

TitleRapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies
Authors
Li, Wen J.Xi, Ning
Issue Date2006
Citation
2006 IEEE Nanotechnology Materials and Devices Conference, NMDC, 2006, v. 1, p. 108-109 How to Cite?
DOI: http://dx.doi.org/10.1109/NMDC.2006.4388707
AbstractOur team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ∼1 sec, which means that potentially 100,000 CNT components could be built in 24 hours. CNT Sensors, DEP Manipulation, Micro-robotics, Nano-sensor Arrays.
Persistent Identifierhttp://hdl.handle.net/10722/212997

 

DC FieldValueLanguage
dc.contributor.authorLi, Wen J.-
dc.contributor.authorXi, Ning-
dc.date.accessioned2015-07-28T04:05:42Z-
dc.date.available2015-07-28T04:05:42Z-
dc.date.issued2006-
dc.identifier.citation2006 IEEE Nanotechnology Materials and Devices Conference, NMDC, 2006, v. 1, p. 108-109-
dc.identifier.urihttp://hdl.handle.net/10722/212997-
dc.description.abstractOur team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ∼1 sec, which means that potentially 100,000 CNT components could be built in 24 hours. CNT Sensors, DEP Manipulation, Micro-robotics, Nano-sensor Arrays.-
dc.languageeng-
dc.relation.ispartof2006 IEEE Nanotechnology Materials and Devices Conference, NMDC-
dc.titleRapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies-
dc.typeConference_Paper-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1109/NMDC.2006.4388707-
dc.identifier.scopuseid_2-s2.0-50249148918-
dc.identifier.volume1-
dc.identifier.spage108-
dc.identifier.epage109-

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