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Conference Paper: Development of CNT based sensor array on a MUMPs chip

TitleDevelopment of CNT based sensor array on a MUMPs chip
Authors
KeywordsCNT sensors
DEP manipulation
Micro-robotic spotting
Nano batch fabrication
Nano manufacturing
Issue Date2006
Citation
2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006, 2006, v. 2, p. 798-801 How to Cite?
AbstractA 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices. © 2006 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/212967

 

DC FieldValueLanguage
dc.contributor.authorLai, King W C-
dc.contributor.authorXi, Ning-
dc.contributor.authorLi, Wen J.-
dc.contributor.authorKwong, C. P.-
dc.date.accessioned2015-07-28T04:05:37Z-
dc.date.available2015-07-28T04:05:37Z-
dc.date.issued2006-
dc.identifier.citation2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006, 2006, v. 2, p. 798-801-
dc.identifier.urihttp://hdl.handle.net/10722/212967-
dc.description.abstractA 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices. © 2006 IEEE.-
dc.languageeng-
dc.relation.ispartof2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006-
dc.subjectCNT sensors-
dc.subjectDEP manipulation-
dc.subjectMicro-robotic spotting-
dc.subjectNano batch fabrication-
dc.subjectNano manufacturing-
dc.titleDevelopment of CNT based sensor array on a MUMPs chip-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-42549120190-
dc.identifier.volume2-
dc.identifier.spage798-
dc.identifier.epage801-

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