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Conference Paper: System errors quantitative analysis of sample-scanning AFM

TitleSystem errors quantitative analysis of sample-scanning AFM
Authors
KeywordsKinematics model
Sample-scanning AFM
Scanning size error
Tube scanner
Vertical cross coupling error
Issue Date2005
Citation
Ultramicroscopy, 2005, v. 105, n. 1-4, p. 336-342 How to Cite?
AbstractDuring imaging or nanomanipulation with a sample-scanning AFM, two important errors, scanning size error and vertical cross coupling error, will be generated due to bend motion of the tube scanner, and these two errors are destructive to nanostructures quantitative analysis. To minimize the errors, a kinematics model of the scanner is presented, and according to the model the two errors are quantitatively analyzed, which shows that scanning size error is greatly affected by sample thickness and nominal scanning size, while vertical cross coupling error is greatly affected by probe tip offset to tube axis and nominal scanning size. Corresponding methods are proposed for minimizing the errors. Gratings imaging experiments verify the kinematics model and errors calculation formulas. © 2005 Elsevier B.V. All rights reserved.
Persistent Identifierhttp://hdl.handle.net/10722/212831
ISSN
2015 Impact Factor: 2.874
2015 SCImago Journal Rankings: 2.140

 

DC FieldValueLanguage
dc.contributor.authorTian, Xiaojun-
dc.contributor.authorXi, Ning-
dc.contributor.authorDong, Zaili-
dc.contributor.authorWang, Yuechao-
dc.date.accessioned2015-07-28T04:05:09Z-
dc.date.available2015-07-28T04:05:09Z-
dc.date.issued2005-
dc.identifier.citationUltramicroscopy, 2005, v. 105, n. 1-4, p. 336-342-
dc.identifier.issn0304-3991-
dc.identifier.urihttp://hdl.handle.net/10722/212831-
dc.description.abstractDuring imaging or nanomanipulation with a sample-scanning AFM, two important errors, scanning size error and vertical cross coupling error, will be generated due to bend motion of the tube scanner, and these two errors are destructive to nanostructures quantitative analysis. To minimize the errors, a kinematics model of the scanner is presented, and according to the model the two errors are quantitatively analyzed, which shows that scanning size error is greatly affected by sample thickness and nominal scanning size, while vertical cross coupling error is greatly affected by probe tip offset to tube axis and nominal scanning size. Corresponding methods are proposed for minimizing the errors. Gratings imaging experiments verify the kinematics model and errors calculation formulas. © 2005 Elsevier B.V. All rights reserved.-
dc.languageeng-
dc.relation.ispartofUltramicroscopy-
dc.subjectKinematics model-
dc.subjectSample-scanning AFM-
dc.subjectScanning size error-
dc.subjectTube scanner-
dc.subjectVertical cross coupling error-
dc.titleSystem errors quantitative analysis of sample-scanning AFM-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1016/j.ultramic.2005.06.046-
dc.identifier.scopuseid_2-s2.0-27544439449-
dc.identifier.volume105-
dc.identifier.issue1-4-
dc.identifier.spage336-
dc.identifier.epage342-

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