Kinematics modeling and system errors analysis for an AFM based nano manipulator

Abstract

During imaging and nanomanipulation with a sample-scanning AFM based nano manipulator, because of bend motion of tube scanner, two important errors will be generated, namely scanning size error and cross coupling error, and they are destructive to both image quantitative analysis and nanomanipulation accuracy. To minimize the errors, a kinematics model of the scanner is presented, which shows that lateral and vertical displacements at any point on sample depend on its offset to tube axis, applied voltage and sample thickness besides scanner geometric parameters and piezoelectric constant. According to the model, the two errors are quantitatively analyzed. Imaging and nanolithography experiments verify the kinematics model and errors calculation formulas, and some methods are also proposed for minimizing the errors. © 2004 IEEE.