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Conference Paper: A polynomial phase-shift algorithm for high precision three-dimensional profilometry

TitleA polynomial phase-shift algorithm for high precision three-dimensional profilometry
Authors
KeywordsIndustrial inspection
Profilometry
Surface measurements
Three-dimensional image acquisition
Issue Date2013
PublisherSociety of Photo-Optical Instrumentation Engineers (SPIE). The Journal's web site is located at http://www.spie.org/app/Publications/index.cfm?fuseaction=proceedings
Citation
Conference 8661 - Image Processing: Machine Vision Applications VI, Burlingame, CA., 5-6 February 2013. In Proceedings of SPIE, 2013, v. 8661, art. no. 866102 How to Cite?
AbstractThe perspective effect is common in real optical systems using projected patterns for machine vision applications. In the past, the frequencies of these sinusoidal patterns are assumed to be uniform at different heights when reconstructing moving objects. Therefore, the error caused by a perspective projection system becomes pronounced in phase-measuring profilometry, especially for some high precision metrology applications such as measuring the surfaces of the semiconductor components at micrometer level. In this work, we investigate the perspective effect on phase-measuring profilometry when reconstructing the surfaces of moving objects. Using a polynomial to approximate the phase distribution under a perspective projection system, which we call a polynomial phase-measuring profilometry (P-PMP) model, we are able to generalize the phase-measuring profilometry model discussed in our previous work and solve the phase reconstruction problem effectively. Furthermore, we can characterize how the frequency of the projected pattern changes according to the height variations and how the phase of the projected pattern distributes in the measuring space. We also propose a polynomial phase-shift algorithm (P-PSA) to correct the phase-shift error due to perspective effect during phase reconstruction. Simulation experiments show that the proposed method can improve the reconstruction quality both visually and numerically. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
DescriptionSystems I
Persistent Identifierhttp://hdl.handle.net/10722/186790
ISBN
ISSN
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorDeng, Fen_US
dc.contributor.authorLiu, Cen_US
dc.contributor.authorSze, W-
dc.contributor.authorDeng, J-
dc.contributor.authorFung, KSM-
dc.contributor.authorLam, EY-
dc.date.accessioned2013-08-20T12:19:31Z-
dc.date.available2013-08-20T12:19:31Z-
dc.date.issued2013en_US
dc.identifier.citationConference 8661 - Image Processing: Machine Vision Applications VI, Burlingame, CA., 5-6 February 2013. In Proceedings of SPIE, 2013, v. 8661, art. no. 866102en_US
dc.identifier.isbn978-081949434-4-
dc.identifier.issn0277-786X-
dc.identifier.urihttp://hdl.handle.net/10722/186790-
dc.descriptionSystems I-
dc.description.abstractThe perspective effect is common in real optical systems using projected patterns for machine vision applications. In the past, the frequencies of these sinusoidal patterns are assumed to be uniform at different heights when reconstructing moving objects. Therefore, the error caused by a perspective projection system becomes pronounced in phase-measuring profilometry, especially for some high precision metrology applications such as measuring the surfaces of the semiconductor components at micrometer level. In this work, we investigate the perspective effect on phase-measuring profilometry when reconstructing the surfaces of moving objects. Using a polynomial to approximate the phase distribution under a perspective projection system, which we call a polynomial phase-measuring profilometry (P-PMP) model, we are able to generalize the phase-measuring profilometry model discussed in our previous work and solve the phase reconstruction problem effectively. Furthermore, we can characterize how the frequency of the projected pattern changes according to the height variations and how the phase of the projected pattern distributes in the measuring space. We also propose a polynomial phase-shift algorithm (P-PSA) to correct the phase-shift error due to perspective effect during phase reconstruction. Simulation experiments show that the proposed method can improve the reconstruction quality both visually and numerically. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.-
dc.languageengen_US
dc.publisherSociety of Photo-Optical Instrumentation Engineers (SPIE). The Journal's web site is located at http://www.spie.org/app/Publications/index.cfm?fuseaction=proceedings-
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_US
dc.rightsProceedings of SPIE - The International Society for Optical Engineering. Copyright © Society of Photo-Optical Instrumentation Engineers (SPIE).-
dc.subjectIndustrial inspection-
dc.subjectProfilometry-
dc.subjectSurface measurements-
dc.subjectThree-dimensional image acquisition-
dc.titleA polynomial phase-shift algorithm for high precision three-dimensional profilometryen_US
dc.typeConference_Paperen_US
dc.identifier.emailLam, EY: elam@eee.hku.hken_US
dc.identifier.authorityLam, EY=rp00131en_US
dc.description.naturelink_to_OA_fulltext-
dc.identifier.doi10.1117/12.2001418-
dc.identifier.scopuseid_2-s2.0-84878084580-
dc.identifier.hkuros220496en_US
dc.identifier.volume8661-
dc.identifier.isiWOS:000321820300001-
dc.publisher.placeUnited States-
dc.customcontrol.immutablesml 130904-

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