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Article: Single-digit nanometer nanoimprint templates

TitleSingle-digit nanometer nanoimprint templates
Authors
Issue Date2013
PublisherSPIE. The SPIE Newsroom website is located at https://spie.org/x1004.xml
Citation
SPIE Newsroom, 2013 (30 July 2013) How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/185965

 

DC FieldValueLanguage
dc.contributor.authorLi, Wen_US
dc.contributor.authorWu, Wen_US
dc.contributor.authorWilliams, RSen_US
dc.date.accessioned2013-08-20T11:48:11Z-
dc.date.available2013-08-20T11:48:11Z-
dc.date.issued2013en_US
dc.identifier.citationSPIE Newsroom, 2013 (30 July 2013)en_US
dc.identifier.urihttp://hdl.handle.net/10722/185965-
dc.languageengen_US
dc.publisherSPIE. The SPIE Newsroom website is located at https://spie.org/x1004.xml-
dc.relation.ispartofSPIE Newsroomen_US
dc.titleSingle-digit nanometer nanoimprint templatesen_US
dc.typeArticleen_US
dc.identifier.emailLi, W: liwd@hku.hken_US
dc.identifier.authorityLi, W=rp01581en_US
dc.identifier.doi10.1117/2.1201307.004975-
dc.identifier.hkuros220427en_US

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