File Download

There are no files associated with this item.

Supplementary

Article: Hotspot-aware fast source and mask optimization

TitleHotspot-aware fast source and mask optimization
Authors
Issue Date2012
Citation
Optics Express, 2012, v. 20, p. 21792-21804 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/185909

 

DC FieldValueLanguage
dc.contributor.authorLI, Jen_US
dc.contributor.authorShen, Yen_US
dc.contributor.authorLam, EYMen_US
dc.date.accessioned2013-08-20T11:44:23Z-
dc.date.available2013-08-20T11:44:23Z-
dc.date.issued2012en_US
dc.identifier.citationOptics Express, 2012, v. 20, p. 21792-21804en_US
dc.identifier.urihttp://hdl.handle.net/10722/185909-
dc.languageengen_US
dc.relation.ispartofOptics Expressen_US
dc.titleHotspot-aware fast source and mask optimizationen_US
dc.typeArticleen_US
dc.identifier.emailShen, Y: shenyj@hku.hken_US
dc.identifier.emailLam, EYM: elam@eee.hku.hken_US
dc.identifier.authorityLam, EYM=rp00131en_US
dc.identifier.hkuros220479en_US
dc.identifier.volume20en_US
dc.identifier.spage21792en_US
dc.identifier.epage21804en_US

Export via OAI-PMH Interface in XML Formats


OR


Export to Other Non-XML Formats