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Conference Paper: High sensitivity 25 μm microbolometer FPAs

TitleHigh sensitivity 25 μm microbolometer FPAs
Authors
Issue Date2002
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
Citation
Proceedings Of Spie - The International Society For Optical Engineering, 2002, v. 4820 n. 1, p. 208-219 How to Cite?
AbstractRaytheon Infrared Operations (RIO) has achieved a significant technical breakthrough in uncooled FPAs by reducing the pixel size by a factor of two while maintaining state-of-the-art sensitivity. Raytheon has produced the first high-quality 320 × 240 microbolometer FPAs with 25 μm pitch pixels. The 320 × 240 FPAs have a sensitivity that is comparable to microbolometer FPAs with 50 μm pixels. The average NETD value for these FPAs is about 35 mK with an f/1 aperture and operating at 30 Hz frame rates. Good pixel operability and excellent image quality have been demonstrated. Pixel operability is greater than 99% on some FPAs, and uncorrected responsivity nonuniformity is less than 4% (sigma/mean). The microbolometer detectors also have a relatively fast thermal time constant of approximately 10 msec. This state-of-the-art performance has been achieved as a result of an advanced micromachining fabrication process. The process allows maximization of both the thermal isolation and the optical fill-factor. The reduction in pixel size offers several potential benefits for IR systems. For a given system resolution (IFOV) requirement, the 25 μm pixels allow a factor of two reduction in both the focal length and aperture size of the sensor optics. The pixel size reduction facilitates a significant FPA cost reduction since the number of die printed on a wafer can be increased. The pixel size reduction has enabled the development of a large-format 640 × 480 FPA array. Raytheon has produced arrays with very good sensitivity, operability, and excellent image quality. These FPAs are applicable to wide-field-of-view, long range surveillance and targeting missions. Raytheon is also developing a high performance 160 × 128 FPA that is designed for applications where miniaturization and temperature invariance are required as well as low cost and low power.
Persistent Identifierhttp://hdl.handle.net/10722/178329
ISSN
References

 

DC FieldValueLanguage
dc.contributor.authorMurphy, Den_US
dc.contributor.authorRay, Men_US
dc.contributor.authorWyles, Ren_US
dc.contributor.authorAsbrock, Jen_US
dc.contributor.authorLum, Nen_US
dc.contributor.authorWyles, Jen_US
dc.contributor.authorHewitt, Cen_US
dc.contributor.authorKennedy, Aen_US
dc.contributor.authorVan Lue, Den_US
dc.contributor.authorAnderson, Jen_US
dc.contributor.authorBradley, Den_US
dc.contributor.authorChin, Ren_US
dc.contributor.authorKostrzewa, Ten_US
dc.date.accessioned2012-12-19T09:46:16Z-
dc.date.available2012-12-19T09:46:16Z-
dc.date.issued2002en_US
dc.identifier.citationProceedings Of Spie - The International Society For Optical Engineering, 2002, v. 4820 n. 1, p. 208-219en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/10722/178329-
dc.description.abstractRaytheon Infrared Operations (RIO) has achieved a significant technical breakthrough in uncooled FPAs by reducing the pixel size by a factor of two while maintaining state-of-the-art sensitivity. Raytheon has produced the first high-quality 320 × 240 microbolometer FPAs with 25 μm pitch pixels. The 320 × 240 FPAs have a sensitivity that is comparable to microbolometer FPAs with 50 μm pixels. The average NETD value for these FPAs is about 35 mK with an f/1 aperture and operating at 30 Hz frame rates. Good pixel operability and excellent image quality have been demonstrated. Pixel operability is greater than 99% on some FPAs, and uncorrected responsivity nonuniformity is less than 4% (sigma/mean). The microbolometer detectors also have a relatively fast thermal time constant of approximately 10 msec. This state-of-the-art performance has been achieved as a result of an advanced micromachining fabrication process. The process allows maximization of both the thermal isolation and the optical fill-factor. The reduction in pixel size offers several potential benefits for IR systems. For a given system resolution (IFOV) requirement, the 25 μm pixels allow a factor of two reduction in both the focal length and aperture size of the sensor optics. The pixel size reduction facilitates a significant FPA cost reduction since the number of die printed on a wafer can be increased. The pixel size reduction has enabled the development of a large-format 640 × 480 FPA array. Raytheon has produced arrays with very good sensitivity, operability, and excellent image quality. These FPAs are applicable to wide-field-of-view, long range surveillance and targeting missions. Raytheon is also developing a high performance 160 × 128 FPA that is designed for applications where miniaturization and temperature invariance are required as well as low cost and low power.en_US
dc.languageengen_US
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xmlen_US
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_US
dc.titleHigh sensitivity 25 μm microbolometer FPAsen_US
dc.typeConference_Paperen_US
dc.identifier.emailChin, R: rchin@hku.hken_US
dc.identifier.authorityChin, R=rp01300en_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1117/12.453902en_US
dc.identifier.scopuseid_2-s2.0-0038324552en_US
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0038324552&selection=ref&src=s&origin=recordpageen_US
dc.identifier.volume4820en_US
dc.identifier.issue1en_US
dc.identifier.spage208en_US
dc.identifier.epage219en_US
dc.publisher.placeUnited Statesen_US
dc.identifier.scopusauthoridMurphy, D=7404062807en_US
dc.identifier.scopusauthoridRay, M=7202800005en_US
dc.identifier.scopusauthoridWyles, R=6603312905en_US
dc.identifier.scopusauthoridAsbrock, J=6505989385en_US
dc.identifier.scopusauthoridLum, N=6602145469en_US
dc.identifier.scopusauthoridWyles, J=6602311244en_US
dc.identifier.scopusauthoridHewitt, C=7202924532en_US
dc.identifier.scopusauthoridKennedy, A=7401653959en_US
dc.identifier.scopusauthoridVan Lue, D=6506721191en_US
dc.identifier.scopusauthoridAnderson, J=10045295500en_US
dc.identifier.scopusauthoridBradley, D=7403123034en_US
dc.identifier.scopusauthoridChin, R=7102445426en_US
dc.identifier.scopusauthoridKostrzewa, T=6602811668en_US

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