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Conference Paper: Buffer gas effects on the ablation rates of copper using a pico-second pulsed Nd:YAG laser

TitleBuffer gas effects on the ablation rates of copper using a pico-second pulsed Nd:YAG laser
Authors
Issue Date1993
PublisherMaterials Research Society. The Journal's web site is located at http://www.mrs.org/publications/epubs/proceedings/spring2004/index.html
Citation
Materials Research Society Symposium Proceedings, 1993, v. 285, p. 187-190 How to Cite?
AbstractCopper samples were ablated by a pico-second pulsed Nd:YAG laser in Ar and He gases under different pressures. At 1064 nm, the change of ablation rate of copper in He gas from 1×10-5 to 760 torr is smaller than that in Ar gas. A model for the development of a plasma above the target surface is presented based on inverse Bremsstrahlung absorption between fast electrons and the gas medium. Ionization rate of the buffer gas versus pressure was estimated using the model, and a good correlation was found with the ablation rate.
Persistent Identifierhttp://hdl.handle.net/10722/168795
ISSN

 

DC FieldValueLanguage
dc.contributor.authorMao, XLen_US
dc.contributor.authorChan, WTen_US
dc.contributor.authorRusso, REen_US
dc.date.accessioned2012-10-08T03:34:17Z-
dc.date.available2012-10-08T03:34:17Z-
dc.date.issued1993en_US
dc.identifier.citationMaterials Research Society Symposium Proceedings, 1993, v. 285, p. 187-190en_US
dc.identifier.issn0272-9172en_US
dc.identifier.urihttp://hdl.handle.net/10722/168795-
dc.description.abstractCopper samples were ablated by a pico-second pulsed Nd:YAG laser in Ar and He gases under different pressures. At 1064 nm, the change of ablation rate of copper in He gas from 1×10-5 to 760 torr is smaller than that in Ar gas. A model for the development of a plasma above the target surface is presented based on inverse Bremsstrahlung absorption between fast electrons and the gas medium. Ionization rate of the buffer gas versus pressure was estimated using the model, and a good correlation was found with the ablation rate.en_US
dc.languageengen_US
dc.publisherMaterials Research Society. The Journal's web site is located at http://www.mrs.org/publications/epubs/proceedings/spring2004/index.htmlen_US
dc.relation.ispartofMaterials Research Society Symposium Proceedingsen_US
dc.titleBuffer gas effects on the ablation rates of copper using a pico-second pulsed Nd:YAG laseren_US
dc.typeConference_Paperen_US
dc.identifier.emailChan, WT:wtchan@hku.hken_US
dc.identifier.authorityChan, WT=rp00668en_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0027277556en_US
dc.identifier.volume285en_US
dc.identifier.spage187en_US
dc.identifier.epage190en_US
dc.publisher.placeUnited Statesen_US
dc.identifier.scopusauthoridMao, XL=7402841260en_US
dc.identifier.scopusauthoridChan, WT=7403918827en_US
dc.identifier.scopusauthoridRusso, RE=7201443495en_US

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