Imaging system modeling and image synthesis for resolution enhancement in optical lithography


Grant Data
Project Title
Imaging system modeling and image synthesis for resolution enhancement in optical lithography
Principal Investigator
Dr Lam, Edmund Yin Mun   (Principal investigator)
Co-Investigator(s)
Dr Wong Alfred Kwok Kit   (Co-Investigator)
Duration
30
Start Date
2007-01-01
Completion Date
2009-06-30
Amount
356000
Conference Title
Presentation Title
Keywords
optical lithography, imaging system, image synthesis
Discipline
Signal and Image Processing,Electronics
Sponsor
RGC General Research Fund (GRF)
HKU Project Code
HKU 7139/06E
Grant Type
General Research Fund (GRF)
Funding Year
2006/2007
Status
Completed