Ultra-thin Si3N4/SiO2 stack dielectric for high-stability MISiC Schottky gas sensors


Grant Data
Project Title
Ultra-thin Si3N4/SiO2 stack dielectric for high-stability MISiC Schottky gas sensors
Principal Investigator
Dr Lai, Pui To   (Principal investigator)
Co-Investigator(s)
Professor Xu Jingping   (Co-Investigator)
Duration
24
Start Date
2002-09-01
Completion Date
2004-08-31
Amount
603404
Conference Title
Presentation Title
Keywords
gas sensors
Discipline
Others - Electrical and Electronic Engineering
Sponsor
RGC General Research Fund (GRF)
HKU Project Code
HKU 7059/02E
Grant Type
General Research Fund (GRF)
Funding Year
2002/2003
Status
Completed