Ultra-thin Si3N4/SiO2 stack dielectric for high-stability MISiC Schottky gas sensors

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Grant Data
Project Title
Ultra-thin Si3N4/SiO2 stack dielectric for high-stability MISiC Schottky gas sensors
Principal Investigator
Professor Lai, Pui To   (Principal Investigator (PI))
Co-Investigator(s)
Professor Xu Jingping   (Co-Investigator)
Duration
24
Start Date
2002-09-01
Amount
603404
Conference Title
Ultra-thin Si3N4/SiO2 stack dielectric for high-stability MISiC Schottky gas sensors
Presentation Title
Keywords
gas sensors
Discipline
Others - Electrical and Electronic Engineering
HKU Project Code
HKU 7059/02E
Grant Type
General Research Fund (GRF)
Funding Year
2002
Status
Completed