Study on High-resolution Nanoimprint Lithography Template Fabrication using Scanning Focused Helium Ion Beam


Grant Data
Project Title
Study on High-resolution Nanoimprint Lithography Template Fabrication using Scanning Focused Helium Ion Beam
Principal Investigator
Dr Li, Wendi   (Principal investigator)
Duration
36
Start Date
2014-01-01
Completion Date
2016-12-31
Amount
314000
Conference Title
Presentation Title
Keywords
Nanoimprint Lithography, Template Fabrication, Helium Ion Beam
Discipline
Production and Manufacturing
Panel
Engineering
HKU Project Code
61306123
Grant Type
National Natural Science Foundation of China (NSFC) - Science Fund for Young Scholars
Funding Year
2013/2014
Status
On-going