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TypeTitleAuthor(s)YearViews
A micro optical filter using polysilicon surface micromachining process
Proceedings/Conference:
Proceedings of SPIE - The International Society for Optical Engineering
Publisher:
S P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
Asundi, A; Zheng, LD; Tien, NC; Chen, Z; Liu, AQ1997162
 
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