Browsing by Author Williams, RS

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Showing results 1 to 4 of 4
TitleAuthor(s)Issue DateViews
 
Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns
Journal:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2012
115
Diamond nitrogen-vacancy centers creation with Helium-Ion Microscope
Proceeding/Conference:CLEO: 2013 Technical Digest
2013
181
 
Nanoimprint lithography with ≤60 nm overlay precision
Journal:HP Laboratories Technical Report
2012
272
 
2013
117