Results 1 to 4 of 4
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TypeTitleAuthor(s)YearViews
Single-digit nanometer nanoimprint templates
Journal:
SPIE Newsroom
Publisher:
SPIE. The SPIE Newsroom website is located at https://spie.org/x1004.xml
Li, W; Wu, W; Williams, RS201389
 
Diamond nitrogen-vacancy centers creation with Helium-Ion Microscope
Proceedings/Conference:
CLEO: 2013 Technical Digest
Publisher:
OSA.
Huang, Z; Li, W; Santori, C; Acosta, VM; Faraon, A; Williams, RS; Beausoleil, RG2013135
 
Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Publisher:
American Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/
Li, W; Wu, W; Williams, RS201283
 
Nanoimprint lithography with ≤60 nm overlay precision
Journal:
HP Laboratories Technical Report
Wu, W; Walmsley, RG; Li, WD; Li, X; Williams, RS2012215
 
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