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Diamond nitrogen-vacancy centers creation with Helium-Ion MicroscopeHuang, Z; Li, W; Santori, C; Acosta, VM; Faraon, A; Williams, RS; Beausoleil, RG201360
Single-digit nanometer nanoimprint templatesLi, W; Wu, W; Williams, RS201352
Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patternsLi, W; Wu, W; Williams, RS201247
Nanoimprint lithography with ≤60 nm overlay precisionWu, W; Walmsley, RG; Li, WD; Li, X; Williams, RS2012150
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