Browse by Author Tang, BY

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	Title	Author(s)	Year	View Count
	A novel distributed system for plasma immersion ion implanter control and automation	Liu, AG; Wang, XF; Tang, BY; Chu, PK; Ko, PK; Cheng, YC	1998	484
	Principles and characteristics of a new generation plasma immersion ion implanter	Chu, PK; Tang, BY; Cheng, YC; Ko, PK	1997	502

Results 1 to 2 of 2