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TypeTitleAuthor(s)YearViews
A novel distributed system for plasma immersion ion implanter control and automation
Publisher:
American Institute of Physics. The Journal's web site is located at http://ojps.aip.org/rsio/
Liu, AG; Wang, XF; Tang, BY; Chu, PK; Ko, PK; Cheng, YC1998544
 
Principles and characteristics of a new generation plasma immersion ion implanter
Publisher:
American Institute of Physics. The Journal's web site is located at http://ojps.aip.org/rsio/
Chu, PK; Tang, BY; Cheng, YC; Ko, PK1997486
 
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