Browsing by Author Mak, GY

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Showing results 1 to 10 of 10
TitleAuthor(s)Issue DateViews
 
Alternating phase-shifting mask design for low aberration sensitivity
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
2004
84
 
Alternating phase-shifting mask design for low aberration sensitivity
Journal:Journal of Microlithography, Microfabrication, and Microsystems
2005
87
 
Interconnected alternating-current light-emitting diode arrays isolated by laser micromachining
Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
2011
72
 
Liquid-immersion laser micromachining of GaN grown on sapphire
Journal:Applied Physics A: Materials Science and Processing
2011
61
Liquid-immersion laser micromachining of GaN trenches and its application in device fabrication
Proceeding/Conference:Physica Status Solidi. C: Current Topics in Solid State Physics
2011
118
 
Metallic nanoparticle array on GaN by microsphere lithography
Journal:Physica Status Solidi (C) Current Topics in Solid State Physics
2009
98
 
Optimization of photomask design for reducing aberration-induced placement error
Journal:IEEE Transactions on Semiconductor Manufacturing
2006
63
 
2011
109
 
Precision laser micromachining of trenches in GaN on sapphire
Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
2010
61
 
Super-resolution reconstruction in a computational compound-eye imaging system
Journal:Multidimensional Systems and Signal Processing
2007
94