Browse by Author Ferguson, R
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| Title | Author(s) | Year | View Count |
 | Characterization of linewidth variation on 248- and 193-nm exposure tools | Gabor, A; Brunner, T; Chen, J; Chen, N; Deshpande, S; Ferguson, R; Horak, DV; Holmes, S; Liebmann, L; Mansfield, S; Molless, A; Progler, CJ; Rabidoux, R; Ryan, D; Talvi, P; Tsou, L; Vampatella, B; Wong, AKK; Yang, Q; Yu, CF | 2001 | 614 |
| Kernel-Based Fast Aerial Image Computation For A Large Scale Design Of Integrated Circuit Patterns | Wong, AKK; Ferguson, R | - | 1,126 |
| Detection Of Phase Defects On Photomasks By Differential Imaging | Ferguson, RA; Ferguson, R; Wong, AKK | - | 906 |
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