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Browsing by Author Yeh, JLA
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Showing results 1 to 7 of 7
Title
Author(s)
Issue Date
Views
Calculation of electrostatic forces and torques in MEMS using path-independent integrals
Journal:
Journal of Micromechanics and Microengineering
Hui, CY
Yeh, JLA
Tien, NC
2000
114
Copper-encapsulated silicon micromachined structures
Journal:
Journal of Microelectromechanical Systems
Yeh, JLA
Jiang, H
Neves, HP
Tien, NC
2000
173
Electrostatic model for an asymmetric combdrive
Journal:
Journal of Microelectromechanical Systems
Yeh, JLA
Hui, CY
Tien, NC
2000
112
Fabrication of high-performance on-chip suspended spiral inductors by micromachining and electroless copper plating
Journal:
IEEE MTT-S International Microwave Symposium Digest
Jiang, H
Wang, Y
Yeh, JLA
Tien, NC
2000
111
Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate
Journal:
Journal of Micromechanics and Microengineering
Jiang, H
Yoo, K
Yeh, JLA
Li, Z
Tien, NC
2002
164
Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator
Journal:
Journal of Microelectromechanical Systems
Yeh, JLA
Jiang, H
Tien, NC
1999
158
On-chip spiral inductors suspended over deep copper-lined cavities
Journal:
IEEE Transactions on Microwave Theory and Techniques
Jiang, H
Wang, Y
Yeh, JLA
Tien, NC
2000
129