Browsing by Author rp01604

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TitleAuthor(s)Issue DateViews
Biomimetic direction-sensitive micromachined diaphragm for ultrasonic transducers
Proceeding/Conference:Proceedings of the IEEE Ultrasonics Symposium
2001
131
 
2000
 
2004
193
Collection of non-gas phase airborne nanoparticles by microfabricated electrostatic precipitator
Proceeding/Conference:Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
2004
82
2005
 
Copper-encapsulated silicon micromachined structures
Journal:Journal of Microelectromechanical Systems
2000
184
 
1987
2015
24
Design and modeling of liquid gallium contact RF MEMS switch
Proceeding/Conference:Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
2010
112
 
2012
150
 
Design, fabrication, and testing of a microfabricated Corona Ionizer
Journal:Journal of Microelectromechanical Systems
2008
Dielectric fluid immersed MEMS tunable capacitors
Proceeding/Conference:IEEE MTT-S International Microwave Symposium Digest
2003
111
Electrical breakdown across micron scale gaps in MEMS structures
Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering
2006
Electrical breakdown response for multiple-gap MEMS structures
Proceeding/Conference:IEEE International Reliability Physics Symposium Proceedings
2006
 
2008
200
 
2009
187
An electrohydrodynamically driven microfabricated actuator for the study of miniature ion propulsion engine and electric wind devices
Proceeding/Conference:Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
2005
119
Electromagnetically shielded high-Q CMOS-compatible copper inductors
Proceeding/Conference:Digest of Technical Papers - IEEE International Solid-State Circuits Conference
2000
75
 
Electrostatic model for an asymmetric combdrive
Journal:Journal of Microelectromechanical Systems
2000
66
Electrostatically driven touch-mode poly-SiC micro speaker
Proceeding/Conference:Proceedings of IEEE Sensors
2007
132